PCB-MEMS, A systematic review of cost effective and reliable systems as promising alternative to devices manufactured under clean room conditions

Abstract

Microelectromechanical systems (MEMS) have played a vital role in general technological development. Since the appearance of the first Printed Circuit Board (PCB) and the posterior size reduction of the systems, MEMS appear as essential elements given the range of applications and possibilities they offer. Scientists worldwide search for improve MEMS, knowing that cost is critical for developing reliable and viable devices. Here is when PCB-MEMS arises as an essential alternative to standard silicon-based MEMS, showing similar behavior and lower costs production because of the usage of most common printed circuit boarding technologies. This work reports a systematic literature review to figure the state of the art of MEMS over PCB and assess its important factors; a recompilation of 60 papers referring to PCB-MEMS were found. At first instance, the scientific community interest is evaluated analyzing the publication rhythm and his behavior in the field over the years, followed by a categorization to examine relevant categories, different devices development, and analyze main fabrication techniques and constituent materials used for its manufacture. Also, an analysis of fabrication complexity according to the use of clean rooms or extra instruments during the manufacturing process is performed. Data and paper analysis drives to confirm the undeniable interest in the field by the scientific community because of all the possibilities and features that PCB-MEMS offers under lower-cost materials and manufacturing techniques. The final behavior of devices manufactured under this technology resembles and, in some cases, equates the standard based Silicon MEMS, but to maintain his cost-effective construction and avoid the use of specialized infrastructure (such as clean rooms), some limitations and restrictions arose. It is reflected in facts as the lack of Micro-Opto-Electromechanical Systems under a PCB platform (PCB MOEMS), or the lack of standardization of PCB on a Lab the next generation PCB-MEMS devices derived from the microfluidics category, which will be treated and analyzed as future work.